ASML, makers of vital semiconductor fabrication machinery powering the world’s leading fabs, including TSMC, provided its first damage-assessment of the fire incident at one of its component plants near Berlin, on January 3. This plant manufactures several mechanical and optical components of semiconductor fabrication machinery, such as wafer tables and clamps, reticle chucks and mirror blocks.
ASML, in a press-release, disclosed that production of components used in DUV (deep-ultraviolet) machines, has been restarted, as that area of the plant is unaffected by the fire. A region of the plant that manufactures wafer clamps for use in its EUV (extreme ultraviolet) machines, however, has been affected by the fire. The company is still in the process of coming up with a recovery plan for this area, and will come up with a tentative date for restart of production only after that. EUV lithography is leveraged for 5 nm and upcoming 3 nm silicon fabrication nodes at TSMC, Samsung, and Intel. TSMC is known to be ASML’s largest customer. ASML stated that it will release its Q4-2021 and full-year 2021 financial results on January 19, and it may provide more updates on the matter.
The press-release follows.